Characterization of a photonic strain sensor in silicon-on-insulator technology
نویسندگان
چکیده
منابع مشابه
Characterization of a photonic strain sensor in silicon-on-insulator technology.
Recently there has been growing interest in sensing by means of optical microring resonators in photonic integrated circuits that are fabricated in silicon-on-insulator (SOI) technology. Taillaert et al. [Proc. SPIE 6619, 661914 (2007)] proposed the use of a silicon-waveguide-based ring resonator as a strain gauge. However, the str...
متن کاملDevelopment of silicon-on-insulator waveguide technology
An overview of the present silicon-on-insulator (SOI) waveguide technology is given and supplemented with an extensive set of theory and simulation results. Characteristics of slab-, rectangularand ridge waveguides in SOI are explained. In particular, the number of modes and the single-mode conditions are carefully analyzed. Experimental work with straight and bent 8 to 10 μm thick SOI ridge wa...
متن کاملIn-plane photonic transduction of silicon-on-insulator microcantilevers.
We demonstrate an in-plane photonic transduction method for microcantilevers, which have been widely investigated for sensor applications. In our approach the microcantilever is etched to form a single mode rib waveguide. Light propagates down the microcantilever and crosses a small gap at the free end of the microcantilever, some of which is captured by an asymmetrical multimode waveguide that...
متن کاملDual-Channel Approach to Photonic Modulators in Silicon-on-Insulator Technology
The well-known main methods to modulate the refractive index in silicon-based waveguides are the thermo-optic effect and the plasma dispersion effect. The latter is much faster, allowing modulation frequencies of the order of gigahertz and it is used to change both the real refractive index and optical absorption coefficient. In this paper, we analyze an improved architecture of a depletion-typ...
متن کاملPhotonic Bands in Patterned Silicon-on-Insulator Waveguides
One– and two-dimensional photonic crystals are obtained by electron beam lithography and reactive ion etching on silicon-on-insulator waveguides. Variable-angle reflectance is measured and calculated in the 0.2–2-eV energy range, giving evidence of the quasi-guided modes of the photonic structure. Photonic bands in the one-dimensional case are determined and compare very well to those calculate...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Optics Letters
سال: 2012
ISSN: 0146-9592,1539-4794
DOI: 10.1364/ol.37.000479